
- theory and operation

- effect of static electricity on MOS
- mosfet fabrication
- Processes
- growing oxide
- application of photoresist (prebaking)
- exposure to uv light
- developer - etches photoresist that has beed exposed to uv light
- etch - will etch anything not covered with photoresist
- photoresist removed - solvent removes photoresist
- diffuse - (phosphorous, aluminum for example)
- See animation link
©Geoff McCulloch, 2003