Mosfet Theory of Operation and Fabrication

  • theory and operation
  • effect of static electricity on MOS
  • mosfet fabrication
    • Processes
      • growing oxide
      • application of photoresist (prebaking)
      • exposure to uv light
      • developer - etches photoresist that has beed exposed to uv light
      • etch - will etch anything not covered with photoresist
      • photoresist removed - solvent removes photoresist
      • diffuse - (phosphorous, aluminum for example)
    • See animation link
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©Geoff McCulloch, 2003